Evaluation of Y2O3 gate insulators for a-IGZO thin film transistors

Published 2009 View Full Article

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Title
Evaluation of Y2O3 gate insulators for a-IGZO thin film transistors
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 14, Pages 4115-4118
Publisher
Elsevier BV
Online
2009-02-18
DOI
10.1016/j.tsf.2009.02.020

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