The effect of deposition power on the electrical properties of Al-doped zinc oxide thin films

Title
The effect of deposition power on the electrical properties of Al-doped zinc oxide thin films
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 8, Pages 082109
Publisher
AIP Publishing
Online
2010-08-28
DOI
10.1063/1.3483232

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