Influence of a highly doped buried layer for HfInZnO thin-film transistors

Title
Influence of a highly doped buried layer for HfInZnO thin-film transistors
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 27, Issue 1, Pages 012001
Publisher
IOP Publishing
Online
2011-12-23
DOI
10.1088/0268-1242/27/1/012001

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