Indium Oxide Thin-Film Transistors Fabricated by RF Sputtering at Room Temperature

Title
Indium Oxide Thin-Film Transistors Fabricated by RF Sputtering at Room Temperature
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 31, Issue 6, Pages 567-569
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-04-21
DOI
10.1109/led.2010.2046133

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