Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones

Published 2010 View Full Article

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Title
Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 7, Issue 7, Pages 561-570
Publisher
Wiley
Online
2010-02-01
DOI
10.1002/ppap.200900139
References
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