Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge

(2012) Hyo-Chang Lee et al.   APPLIED PHYSICS LETTERS

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

(2012) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4plasma

(2012) Shu-Xia Zhao et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

(2011) V A Godyak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Numerical study of the plasma chemistry in inductively coupled SF6and SF6/Ar plasmas used for deep silicon etching applications

(2011) M Mao et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The Boltzmann relation and its validity in magnetized plasmas

(2011) R. N. FRANKLIN   JOURNAL OF PLASMA PHYSICS

Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas

(2011) Young-Do Kim et al.   PHYSICS OF PLASMAS

A multi-term solution of the nonconservative Boltzmann equation for the analysis of temporal and spatial non-local effects in charged-particle swarms in electric and magnetic fields

(2011) S Dujko et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

(2011) Hyo-Chang Lee et al.   THIN SOLID FILMS

Role of transverse magnetic field in the capacitive discharge

(2011) S.J. You et al.   THIN SOLID FILMS

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

(2010) Hyo-Chang Lee et al.   APPLIED PHYSICS LETTERS

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

(2010) Hyo-Chang Lee et al.   APPLIED PHYSICS LETTERS

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

(2010) Min-Hyong Lee et al.   PHYSICAL REVIEW E

Low energy electron heating and evolution of the electron energy distribution by diluted O2 in an inductive Ar/O2 mixture discharge

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

A numerical method for determining highly precise electron energy distribution functions from Langmuir probe characteristics

(2010) Jin-Young Bang et al.   PHYSICS OF PLASMAS

Cross Sections for Electron Collisions with Oxygen Molecules

(2009) Yukikazu Itikawa   JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA

Effects of enhanced cathode electron emission on Hall thruster operation

(2009) Y. Raitses et al.   PHYSICS OF PLASMAS

Experimental investigation of the Boltzmann relation for a bi-Maxwellian distribution in inductively coupled plasmas

(2009) Jin Young Bang et al.   PHYSICS OF PLASMAS