Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

Published 2010 View Full Article

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Title
Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 4, Pages 041503
Publisher
AIP Publishing
Online
2010-01-29
DOI
10.1063/1.3291038

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