Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas

Published 2011 View Full Article

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Title
Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 18, Issue 3, Pages 033508
Publisher
AIP Publishing
Online
2011-03-26
DOI
10.1063/1.3570664
References
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