Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

Title
Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 19, Issue 3, Pages 033514
Publisher
AIP Publishing
Online
2012-03-30
DOI
10.1063/1.3692768

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