Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

(2010) Hyo-Chang Lee et al.   APPLIED PHYSICS LETTERS

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

(2010) Hyo-Chang Lee et al.   APPLIED PHYSICS LETTERS

Low energy electron heating and evolution of the electron energy distribution by diluted O2 in an inductive Ar/O2 mixture discharge

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

A global (volume averaged) model of a nitrogen discharge: I. Steady state

(2009) E G Thorsteinsson et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas

(2008) Min-Hyong Lee et al.   APPLIED PHYSICS LETTERS

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

(2008) A. M. Daltrini et al.   APPLIED PHYSICS LETTERS

Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

(2008) Z. F. Ding et al.   PHYSICS OF PLASMAS