Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Fluid simulation of the E-H mode transition in inductively coupled plasma

(2009) Shu-Xia Zhao et al.   JOURNAL OF APPLIED PHYSICS

Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

(2009) Shu-Xia Zhao et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Comparison between experiment and simulation for argon inductively coupled plasma

(2009) Fei Gao et al.   PHYSICS OF PLASMAS

Observation of inverse hysteresis in the E to H mode transitions in inductively coupled plasmas

(2009) Min-Hyong Lee et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

(2008) A. M. Daltrini et al.   APPLIED PHYSICS LETTERS

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

(2008) S. V. Singh   JOURNAL OF APPLIED PHYSICS

Electrical characterization of an inductively coupled gaseous electronics conference reference cell

(2008) S. V. Singh et al.   JOURNAL OF APPLIED PHYSICS

Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

(2008) Z. F. Ding et al.   PHYSICS OF PLASMAS