Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

Title
Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 22, Pages 225203
Publisher
IOP Publishing
Online
2009-10-27
DOI
10.1088/0022-3727/42/22/225203

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