Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas

(2009) Yousuke Jinbo et al.   Applied Physics Express

Fluid simulation of the E-H mode transition in inductively coupled plasma

(2009) Shu-Xia Zhao et al.   JOURNAL OF APPLIED PHYSICS

Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals

(2009) Hailing Wang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

(2008) A. M. Daltrini et al.   APPLIED PHYSICS LETTERS

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

(2008) S. V. Singh   JOURNAL OF APPLIED PHYSICS

Electrical characterization of an inductively coupled gaseous electronics conference reference cell

(2008) S. V. Singh et al.   JOURNAL OF APPLIED PHYSICS

Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

(2008) Z. F. Ding et al.   PHYSICS OF PLASMAS