Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

Published 2008 View Full Article

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Title
Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 15, Issue 6, Pages 063506
Publisher
AIP Publishing
Online
2008-06-11
DOI
10.1063/1.2931038
References
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