Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity

Title
Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
Authors
Keywords
-
Journal
Nanoscale
Volume 5, Issue 3, Pages 984-990
Publisher
Royal Society of Chemistry (RSC)
Online
2012-11-28
DOI
10.1039/c2nr33341d

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