Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
Published 2012 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
Authors
Keywords
-
Journal
Nanoscale
Volume 5, Issue 3, Pages 984-990
Publisher
Royal Society of Chemistry (RSC)
Online
2012-11-28
DOI
10.1039/c2nr33341d
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Large-scale parallel arrays of silicon nanowires via block copolymer directed self-assembly
- (2012) Richard A. Farrell et al. Nanoscale
- Nanofabrication of Broad-Band Antireflective Surfaces Using Self-Assembly of Block Copolymers
- (2011) Birgit Päivänranta et al. ACS Nano
- Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions
- (2011) Sivashankar Krishnamoorthy et al. ADVANCED FUNCTIONAL MATERIALS
- High order symmetry interference lithography based nanoimprint
- (2011) Alban A. Letailleur et al. JOURNAL OF APPLIED PHYSICS
- Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography
- (2011) Marco Faustini et al. JOURNAL OF MATERIALS CHEMISTRY
- How to exploit the full potential of the dip-coating process to better control film formation
- (2011) David Grosso JOURNAL OF MATERIALS CHEMISTRY
- Molecular and supramolecular dynamics of hybrid organic–inorganic interfaces for the rational construction of advanced hybrid nanomaterials
- (2010) David Grosso et al. CHEMICAL SOCIETY REVIEWS
- Hydrophobic, Antireflective, Self-Cleaning, and Antifogging Sol−Gel Coatings: An Example of Multifunctional Nanostructured Materials for Photovoltaic Cells
- (2010) Marco Faustini et al. CHEMISTRY OF MATERIALS
- Polystyrene sphere-assisted one-dimensional nanostructure arrays: synthesis and applications
- (2010) Liang Li et al. JOURNAL OF MATERIALS CHEMISTRY
- Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics
- (2009) Ho-Cheol Kim et al. CHEMICAL REVIEWS
- High resolution study of etch figures on CaF2 (111)
- (2009) Christian Motzer et al. JOURNAL OF APPLIED PHYSICS
- Direct electrogeneration of FePt nanoparticles into highly ordered Inorganic NanoPattern stabilising membranes
- (2009) Joachim Allouche et al. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
- Sol–gel route to advanced nanoelectrode arrays (NEA) based on titania gold nanocomposites
- (2008) Christel Laberty-Robert et al. JOURNAL OF MATERIALS CHEMISTRY
- Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching
- (2008) Zhipeng Huang et al. NANO LETTERS
- Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
- (2008) C. Tang et al. SCIENCE
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started