Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
出版年份 2012 全文链接
标题
Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
作者
关键词
-
出版物
Nanoscale
Volume 5, Issue 3, Pages 984-990
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-11-28
DOI
10.1039/c2nr33341d
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