Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

Title
Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 11, Pages 3597
Publisher
Royal Society of Chemistry (RSC)
Online
2011-01-27
DOI
10.1039/c0jm03493b

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