期刊
METALS AND MATERIALS INTERNATIONAL
卷 16, 期 6, 页码 953-958出版社
KOREAN INST METALS MATERIALS
DOI: 10.1007/s12540-010-1214-1
关键词
ZnO semiconductors; PVP (poly-4-vinylphenol) insulators; electrical properties; X-ray diffraction; atomic layer deposition; thin film transistors
资金
- Korean Government (MOEHRD) [KRF-2008-314-D00211]
Organic-inorganic thin film transistors (OITFTs) with Al/ZnO/PVP structure on Si substrate were fabricated and studied as to their structural and electrical properties. PVP (poly-4-vinylphenol) organic gate insulator was coated on Si substrate by spin coating method. The ZnO was deposited as an active layer by using the atomic layer deposition (ALD) method on PVP/Si substrate at various temperatures ranging from 80 to 140 A degrees C. The structural and electrical properties of ZnO thin films were analyzed by X-ray diffraction and by hall-effect measurement system for optimum process of the OITFT. The grain size and carrier concentration of ZnO films increased, and the resistivity decreased as the deposition temperature increased from 80 to 140 A degrees C. The field effect mobility, on/off current ratio and threshold voltage of OITFTs with ZnO active layer deposited at 100 A degrees C were found to be 0.37 cm(2)/V center dot s, 5x10(2) and 5 V, respectively.
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