Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
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Title
Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A122
Publisher
American Vacuum Society
Online
2012-11-09
DOI
10.1116/1.4763360
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