Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques

Title
Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A122
Publisher
American Vacuum Society
Online
2012-11-09
DOI
10.1116/1.4763360

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