Al2O3 and TiO2 Atomic Layer Deposition on Copper for Water Corrosion Resistance

Published 2011 View Full Article

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Title
Al2O3 and TiO2 Atomic Layer Deposition on Copper for Water Corrosion Resistance
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 3, Issue 12, Pages 4593-4601
Publisher
American Chemical Society (ACS)
Online
2011-10-28
DOI
10.1021/am2009579

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