Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
出版年份 2012 全文链接
标题
Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A122
出版商
American Vacuum Society
发表日期
2012-11-09
DOI
10.1116/1.4763360
参考文献
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- (2011) A. I. Abdulagatov et al. ACS Applied Materials & Interfaces
- Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition
- (2011) Shih-Hui Jen et al. JOURNAL OF APPLIED PHYSICS
- Quantitative calcium resistivity based method for accurate and scalable water vapor transmission rate measurement
- (2011) Matthew O. Reese et al. REVIEW OF SCIENTIFIC INSTRUMENTS
- Electrical calcium test for moisture barrier evaluation for organic devices
- (2011) S. Schubert et al. REVIEW OF SCIENTIFIC INSTRUMENTS
- Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers
- (2010) P. F. Carcia et al. APPLIED PHYSICS LETTERS
- Transformation of Alumina Inclusions by Calcium Treatment
- (2010) Minna Lind et al. METALLURGICAL AND MATERIALS TRANSACTIONS B-PROCESS METALLURGY AND MATERIALS PROCESSING SCIENCE
- Multilayer barrier films comprising nitrogen spacers between free-standing barrier layers
- (2009) Jimmy Granstrom et al. APPLIED PHYSICS LETTERS
- A hybrid encapsulation method for organic electronics
- (2009) N. Kim et al. APPLIED PHYSICS LETTERS
- Reliable thin film encapsulation for organic light emitting diodes grown by low-temperature atomic layer deposition
- (2009) J. Meyer et al. APPLIED PHYSICS LETTERS
- Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition
- (2009) P. F. Carcia et al. JOURNAL OF APPLIED PHYSICS
- Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition
- (2009) Yadong Zhang et al. THIN SOLID FILMS
- Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition
- (2009) Yadong Zhang et al. THIN SOLID FILMS
- The impact of water vapor transmission rate on the lifetime of flexible polymer solar cells
- (2008) Jens A. Hauch et al. APPLIED PHYSICS LETTERS
- Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition
- (2008) Arrelaine A. Dameron et al. Journal of Physical Chemistry C
- Phase formation of CaAl2O4 from CaCO3–Al2O3 powder mixtures
- (2007) Shahriar Iftekhar et al. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
- Estimation of moisture barrier ability of thin SiNx single layer on polymer substrates prepared by Cat-CVD method
- (2007) K. Saitoh et al. THIN SOLID FILMS
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