Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques

标题
Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A122
出版商
American Vacuum Society
发表日期
2012-11-09
DOI
10.1116/1.4763360

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