Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers

Title
Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 22, Pages 221901
Publisher
AIP Publishing
Online
2010-12-01
DOI
10.1063/1.3519476

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