Spectroscopic ellipsometry and x-ray photoelectron spectroscopy of La2O3 thin films deposited by reactive magnetron sputtering
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Title
Spectroscopic ellipsometry and x-ray photoelectron spectroscopy of La2O3 thin films deposited by reactive magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 2, Pages 021004
Publisher
American Vacuum Society
Online
2011-01-20
DOI
10.1116/1.3539069
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