Electrical properties of Ge metal-oxide-semiconductor capacitors with La2O3 gate dielectric annealed in different ambient

Published 2010 View Full Article

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Title
Electrical properties of Ge metal-oxide-semiconductor capacitors with La2O3 gate dielectric annealed in different ambient
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 23, Pages 6962-6965
Publisher
Elsevier BV
Online
2010-07-15
DOI
10.1016/j.tsf.2010.07.030

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