期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
卷 29, 期 2, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.3539069
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Lanthanum oxide (La2O3) films were grown by the reactive dc magnetron sputtering and studied their structural, chemical and optical parameters. La2O3 films were deposited onto Si substrates by sputtering La-metal in a reactive gas (Ar+O-2) mixture at a substrate temperature of 200 degrees C. Reflection high-energy electron diffraction measurements confirm the amorphous state of La2O3 films. Chemical analysis of the top-surface layers evaluated with x-ray photoelectron spectroscopy indicates the presence of a layer modified by hydroxylation due to interaction with atmosphere. Optical parameters of a-La2O3 were determined with spectroscopic ellipsometry (SE). There is no optical absorption over spectral range lambda = 250-1100 nm. Dispersion of refractive index of a-La2O3 was defined by fitting of SE parameters over lambda = 250-1100 nm. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3539069]
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