4.7 Article

Effect of hydration on the properties of lanthanum oxide and lanthanum aluminate thin films

Journal

CERAMICS INTERNATIONAL
Volume 34, Issue 4, Pages 957-960

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2007.09.072

Keywords

dielectric properties; hydration; high-k material; gate oxide

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The properties of lanthanum oxide films and lanthanum aluminate films were investigated after dipping the films in DI-water. The La2O3 film showed rapid dissolution in DI-water and a swift decrease in thickness resulting in an increased leakage current density. The LAO film showed almost no changes in thickness due to the formation of a layer, preventing dissolution. It was revealed that the changes in the films' oxygen contents during the hydration process affected the films' dielectric constants. The LAO films showed better hydration resistance characteristics, which are typically more suitable for conventional semiconductor manufacturing processes. (c) 2007 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

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