Band gap enhancement and electrical properties of La2O3 films doped with Y2O3 as high-k gate insulators

Title
Band gap enhancement and electrical properties of La2O3 films doped with Y2O3 as high-k gate insulators
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 4, Pages 042901
Publisher
AIP Publishing
Online
2009-01-27
DOI
10.1063/1.3075954

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