Suppression of endurance degradation by utilizing oxygen plasma treatment in HfO2 resistive switching memory

Title
Suppression of endurance degradation by utilizing oxygen plasma treatment in HfO2 resistive switching memory
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 15, Pages 153502
Publisher
AIP Publishing
Online
2015-04-16
DOI
10.1063/1.4918679

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