ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

Published 2007 View Full Article

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Title
ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 7, Pages 1523-1528
Publisher
Elsevier BV
Online
2007-04-06
DOI
10.1016/j.tsf.2007.03.144

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