Strain and lattice orientation distribution in SiN/Ge complementary metal–oxide–semiconductor compatible light emitting microstructures by quick x-ray nano-diffraction microscopy

Title
Strain and lattice orientation distribution in SiN/Ge complementary metal–oxide–semiconductor compatible light emitting microstructures by quick x-ray nano-diffraction microscopy
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 7, Pages 071902
Publisher
AIP Publishing
Online
2015-02-19
DOI
10.1063/1.4909529

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