Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces

Title
Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 3, Pages 035003
Publisher
IOP Publishing
Online
2014-02-05
DOI
10.1088/0960-1317/24/3/035003

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