A novel masking method for high aspect ratio penetrating microelectrode arrays

Title
A novel masking method for high aspect ratio penetrating microelectrode arrays
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 3, Pages 035004
Publisher
IOP Publishing
Online
2009-01-31
DOI
10.1088/0960-1317/19/3/035004

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