Micro/nanomechanical behavior of magnetron sputtered Si–C–N coatings through nanoindentation and scratch tests

Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

(2010) Arnab Sankar Bhattacharyya et al.   JOURNAL OF RAMAN SPECTROSCOPY

Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films

(2010) A. S. Bhattacharyya et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Indentation analysis of elastic and plastic deformation of precursor-derived Si–C–N ceramics

(2009) Narayanan Janakiraman et al.   JOURNAL OF THE EUROPEAN CERAMIC SOCIETY

Effect of radio frequency and direct current modes of deposition on protective metallurgical hard silicon carbon nitride coatings by magnetron sputtering

(2009) A.S. Bhattacharyya et al.   VACUUM

A comparative study of Si–C–N films on different substrates grown by RF magnetron sputtering

(2008) A.S. Bhattacharyya et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films

(2008) H. Hoche et al.   SURFACE & COATINGS TECHNOLOGY

Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system

(2008) Shengli Ma et al.   SURFACE & COATINGS TECHNOLOGY

Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

(2007) S.K. Mishra et al.   MATERIALS LETTERS