Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

Published 2007 View Full Article

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Title
Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 62, Issue 3, Pages 398-402
Publisher
Elsevier BV
Online
2007-05-26
DOI
10.1016/j.matlet.2007.05.043

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