Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system

Published 2008 View Full Article

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Title
Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 22-23, Pages 5379-5382
Publisher
Elsevier BV
Online
2008-06-16
DOI
10.1016/j.surfcoat.2008.06.057

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