Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films

Published 2010 View Full Article

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Title
Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 4, Pages 505-509
Publisher
American Vacuum Society
Online
2010-07-01
DOI
10.1116/1.3420430

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