Structure and refractive index of thin alumina films grown by atomic layer deposition

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

(2011) Feng Zhang et al.   JOURNAL OF APPLIED PHYSICS

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Encapsulation of Cu(InGa)Se2 solar cell with Al2O3 thin-film moisture barrier grown by atomic layer deposition

(2010) P.F. Carcia et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Thin-film encapsulation of polymer-based bulk-heterojunction photovoltaic cells by atomic layer deposition

(2009) Chih-Yu Chang et al.   ORGANIC ELECTRONICS