Three-dimensional observation of defects in nitrogen-doped 6H-SiC crystals using a laser scanning confocal microscope

Title
Three-dimensional observation of defects in nitrogen-doped 6H-SiC crystals using a laser scanning confocal microscope
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS SCIENCE
Volume 47, Issue 7, Pages 3429-3434
Publisher
Springer Nature
Online
2011-12-19
DOI
10.1007/s10853-011-6190-4

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