Three-dimensional observation of defects in nitrogen-doped 6H-SiC crystals using a laser scanning confocal microscope

标题
Three-dimensional observation of defects in nitrogen-doped 6H-SiC crystals using a laser scanning confocal microscope
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE
Volume 47, Issue 7, Pages 3429-3434
出版商
Springer Nature
发表日期
2011-12-19
DOI
10.1007/s10853-011-6190-4

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