Identification of SiC polytypes by etched Si-face morphology

Published 2009 View Full Article

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Title
Identification of SiC polytypes by etched Si-face morphology
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 12, Issue 3, Pages 113-117
Publisher
Elsevier BV
Online
2009-09-26
DOI
10.1016/j.mssp.2009.08.004

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