A study on H2 plasma treatment effect on a-IGZO thin film transistor
Published 2012 View Full Article
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Title
A study on H2 plasma treatment effect on a-IGZO thin film transistor
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 27, Issue 17, Pages 2318-2325
Publisher
Cambridge University Press (CUP)
Online
2012-08-22
DOI
10.1557/jmr.2012.199
References
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