Mechanisms of Atomic Layer Deposition on Substrates with Ultrahigh Aspect Ratios

Title
Mechanisms of Atomic Layer Deposition on Substrates with Ultrahigh Aspect Ratios
Authors
Keywords
-
Journal
LANGMUIR
Volume 24, Issue 3, Pages 943-948
Publisher
American Chemical Society (ACS)
Online
2008-01-01
DOI
10.1021/la7018617

Ask authors/readers for more resources

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now