Internal strain mechanism of the incomplete phase separation of nonstoichiometric silicon oxide films

Published 2013 View Full Article

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Title
Internal strain mechanism of the incomplete phase separation of nonstoichiometric silicon oxide films
Authors
Keywords
-
Journal
SOLID STATE COMMUNICATIONS
Volume 179, Issue -, Pages 39-42
Publisher
Elsevier BV
Online
2013-11-21
DOI
10.1016/j.ssc.2013.11.016

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