Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films

Published 2011 View Full Article

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Title
Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 17, Pages 5820-5825
Publisher
Elsevier BV
Online
2011-01-01
DOI
10.1016/j.tsf.2010.12.189

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