Performance and Reliability of ${\rm Gd}_{2}{\rm O}_{3}$ and Stacked ${\rm Gd}_{2}{\rm O}_{3}\hbox{-}{\rm Eu}_{2}{\rm O}_{3}$ Metal-Insulator-Metal Capacitors

Title
Performance and Reliability of ${\rm Gd}_{2}{\rm O}_{3}$ and Stacked ${\rm Gd}_{2}{\rm O}_{3}\hbox{-}{\rm Eu}_{2}{\rm O}_{3}$ Metal-Insulator-Metal Capacitors
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 60, Issue 5, Pages 1523-1528
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-03-19
DOI
10.1109/ted.2013.2249854

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