Physical and Electrical Characterization of Metal–Insulator–Metal Capacitors With $\hbox{Sm}_{2}\hbox{O}_{3}$ and $\hbox{Sm}_{2}\hbox{O}_{3}/\hbox{SiO}_{2}$ Laminated Dielectrics for Analog Circuit Applications

Published 2009 View Full Article

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Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES

Volume 56, Issue 11, Pages 2683-2691

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2009-09-25

DOI

10.1109/ted.2009.2030539

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