High performance TaYOx-based MIM capacitors

Published 2009 View Full Article

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Title
High performance TaYOx-based MIM capacitors
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 11, Pages 2180-2186
Publisher
Elsevier BV
Online
2009-03-12
DOI
10.1016/j.mee.2009.03.025

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