High-Mobility TaN/$\hbox{Al}_{2}\hbox{O}_{3}$/Ge(111) n-MOSFETs With RTO-Grown Passivation Layer

Title
High-Mobility TaN/$\hbox{Al}_{2}\hbox{O}_{3}$/Ge(111) n-MOSFETs With RTO-Grown Passivation Layer
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume -, Issue -, Pages -
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-10-08
DOI
10.1109/led.2010.2071373

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