A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
出版年份 2018 全文链接
标题
A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
作者
关键词
SU-8 polymer, Surface stress, Biological sensor, Cantilever, Chemical sensor, Piezoresistor, Immobilization
出版物
Nano-Micro Letters
Volume 10, Issue 2, Pages -
出版商
Springer Nature
发表日期
2018-02-02
DOI
10.1007/s40820-018-0189-1
参考文献
相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。- Piezoresistive Composite Silicon Dioxide Nanocantilever Surface Stress Sensor: Design and Optimization
- (2018) Ribu Mathew et al. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Evaluation of Effective Elastic, Piezoelectric, and Dielectric Properties of SU8/ZnO Nanocomposite for Vertically Integrated Nanogenerators Using Finite Element Method
- (2017) Neelam Mishra et al. Journal of Nanomaterials
- Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel
- (2017) Zebing Mao et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Moisture effect on interfacial integrity of epoxy-bonded system: a hierarchical approach
- (2017) Lik-ho Tam et al. NANOTECHNOLOGY
- Design and analysis of MEMS MWCNT/epoxy strain sensor using COMSOL
- (2017) Gaurav Sapra et al. PRAMANA-JOURNAL OF PHYSICS
- Fabrication of Circuits on Flexible Substrates Using Conductive SU-8 for Sensing Applications
- (2017) Carlos Gerardo et al. SENSORS
- Bioinspired flexible microfluidic shear force sensor skin
- (2017) Jianzhu Yin et al. SENSORS AND ACTUATORS A-PHYSICAL
- In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors
- (2017) Ribu Mathew et al. AIP Advances
- An Overview of Carbon Nanotubes and Graphene for Biosensing Applications
- (2017) Zanzan Zhu Nano-Micro Letters
- Nanogenerators for Self-Powered Gas Sensing
- (2017) Zhen Wen et al. Nano-Micro Letters
- Recent Advances of Graphitic Carbon Nitride-Based Structures and Applications in Catalyst, Sensing, Imaging, and LEDs
- (2017) Aiwu Wang et al. Nano-Micro Letters
- Low-Dimensional Halide Perovskites and Their Advanced Optoelectronic Applications
- (2017) Jian Zhang et al. Nano-Micro Letters
- An Overview of Carbon Nanotubes and Graphene for Biosensing Applications
- (2017) Zanzan Zhu Nano-Micro Letters
- Nanogenerators for Self-Powered Gas Sensing
- (2017) Zhen Wen et al. Nano-Micro Letters
- Recent Advances of Graphitic Carbon Nitride-Based Structures and Applications in Catalyst, Sensing, Imaging, and LEDs
- (2017) Aiwu Wang et al. Nano-Micro Letters
- Low-Dimensional Halide Perovskites and Their Advanced Optoelectronic Applications
- (2017) Jian Zhang et al. Nano-Micro Letters
- Fabrication, Characterization and Application of ZnO Nanostructure-Based Micro-Preconcentrator for TNT Sensing
- (2016) Nikhilendu Tiwary et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Polypyrrole/Silver Coaxial Nanowire Aero-Sponges for Temperature-Independent Stress Sensing and Stress-Triggered Joule Heating
- (2015) Weina He et al. ACS Nano
- Permeability thickness dependence of polydimethylsiloxane (PDMS) membranes
- (2015) G. Firpo et al. JOURNAL OF MEMBRANE SCIENCE
- Polymeric Piezoresistive Microcantilevers With Reduced Electrical Variability
- (2015) Madhuri Vinchurkar et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Review of polymer MEMS micromachining
- (2015) Brian J Kim et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Design of a triangular platform piezoresistive affinity microcantilever sensor for biochemical sensing applications
- (2015) Ribu Mathew et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Piezoresistive cantilevers for nanomechanical sensing
- (2015) Joan Bausells MICROELECTRONIC ENGINEERING
- Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever
- (2015) Hutomo Suryo Wasisto et al. MICROELECTRONIC ENGINEERING
- Harnessing the damping properties of materials for high-speed atomic force microscopy
- (2015) Jonathan D. Adams et al. Nature Nanotechnology
- Flexible polymer-multiwall carbon nanotubes composite developed byin situpolymerization technique
- (2015) Sasmita Nayak et al. POLYMER COMPOSITES
- Biomedical Perspective of Electrochemical Nanobiosensor
- (2015) Priti Singh et al. Nano-Micro Letters
- Review on Zinc Oxide Nanoparticles: Antibacterial Activity and Toxicity Mechanism
- (2015) Amna Sirelkhatim et al. Nano-Micro Letters
- Advanced thermo-mechanical characterization of organic materials by piezoresistive organic resonators
- (2015) D. Thuau et al. Materials Horizons
- Biomedical Perspective of Electrochemical Nanobiosensor
- (2015) Priti Singh et al. Nano-Micro Letters
- Review on Zinc Oxide Nanoparticles: Antibacterial Activity and Toxicity Mechanism
- (2015) Amna Sirelkhatim et al. Nano-Micro Letters
- Detection of the antiepileptic drug phenytoin using a single free-standing piezoresistive microcantilever for therapeutic drug monitoring
- (2014) Long-Sun Huang et al. BIOSENSORS & BIOELECTRONICS
- DC-Biased Piezoelectret Film Transducers for Airborne Ultrasound
- (2014) J. Hillenbrand et al. FERROELECTRICS
- Development of graphene nanoplatelet embedded polymer microcantilever for vapour phase explosive detection applications
- (2014) Prasenjit Ray et al. JOURNAL OF APPLIED PHYSICS
- Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
- (2014) Bilal Komati et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Mechanical phenotyping of breast cancer using MEMS: a method to demarcate benign and cancerous breast tissues
- (2014) Hardik J. Pandya et al. LAB ON A CHIP
- MEMS based low cost piezoresistive microcantilever force sensor and sensor module
- (2014) H.J. Pandya et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols
- (2014) Hutomo Suryo Wasisto et al. Micro & Nano Letters
- Inorganic Materials as Supports for Covalent Enzyme Immobilization: Methods and Mechanisms
- (2014) Paolo Zucca et al. MOLECULES
- An ultra-sensitive piezoresistive polymer nano-composite microcantilever platform for humidity and soil moisture detection
- (2014) Sheetal J. Patil et al. SENSORS AND ACTUATORS B-CHEMICAL
- A highly sensitive humidity sensor with a novel hole array structure using a polyimide sensing layer
- (2014) Kyo Sang Choi et al. RSC Advances
- Piezoresistive measurement of Swine H1N1 Hemagglutinin peptide binding with microcantilever arrays
- (2014) N. Bajwa et al. AIP Advances
- Zinc Oxide Nanostructures for NO2 Gas–Sensor Applications: A Review
- (2014) Rajesh Kumar et al. Nano-Micro Letters
- Surface stress-based biosensors
- (2013) Shengbo Sang et al. BIOSENSORS & BIOELECTRONICS
- Droplet-Based Sensing: Optical Microresonator Sensors Embedded in Digital Electrowetting Microfluidics Systems
- (2013) Matthew White Royal et al. IEEE SENSORS JOURNAL
- Fabrication and Characterization of Polymer Hollow Microneedle Array Using UV Lithography Into Micromolds
- (2013) Po-Chun Wang et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Improving sensitivity of piezoresistive microcantilever biosensors using stress concentration region designs
- (2013) M Z Ansari et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators
- (2013) Hutomo Suryo Wasisto et al. Micro & Nano Letters
- Investigation on the effect of different design of SCR on the change of resistance in piezoresistive micro cantilever
- (2013) Khairul Anuar Abd Wahid et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Production of vertical nanowire resonators by cryogenic-ICP–DRIE
- (2013) S. Merzsch et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- A protocol for improving fabrication yield of thin SU-8 microcantilevers for use in an aptasensor
- (2013) Yang Choon Lim et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
- (2013) Hutomo Suryo Wasisto et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications
- (2013) Hutomo Suryo Wasisto et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Air-Coupled Piezoelectric Transducers with Active Polypropylene Foam Matching Layers
- (2013) Tomás Gómez Alvarez-Arenas SENSORS
- A fully integrated wireless CMOS microcantilever lab chip for detection of DNA from Hepatitis B virus (HBV)
- (2013) Che-Wei Huang et al. SENSORS AND ACTUATORS B-CHEMICAL
- Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection
- (2013) Hutomo Suryo Wasisto et al. SENSORS AND ACTUATORS B-CHEMICAL
- An ultra-sensitive piezoresistive polymer nano-composite microcantilever sensor electronic nose platform for explosive vapor detection
- (2013) Sheetal J. Patil et al. SENSORS AND ACTUATORS B-CHEMICAL
- Cyclic olefin copolymer based microfluidic devices for biochip applications: Ultraviolet surface grafting using 2-methacryloyloxyethyl phosphorylcholine
- (2012) Rajeeb K. Jena et al. Biomicrofluidics
- Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing
- (2012) C. Vijaya Bhaskar Reddy et al. IEEE TRANSACTIONS ON NANOTECHNOLOGY
- Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using Electromigration
- (2012) S. M. Mohanasundaram et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- NiCr MEMS Tactile Sensors Embedded in Polyimide Toward Smart Skin
- (2012) Rohit Kilaru et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Stepped piezoresistive microcantilever designs for biosensors
- (2012) Mohd Zahid Ansari et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Experimental analysis of galvanic corrosion of a thin metal film in a multilayer stack for MEMS application
- (2012) A. Ravi Sankar et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Low-cost polymeric microcantilever sensor with titanium as piezoresistive material
- (2012) A. Shokuhfar et al. MICROELECTRONIC ENGINEERING
- Challenges for nanomechanical sensors in biological detection
- (2012) Montserrat Calleja et al. Nanoscale
- Quantification of the surface stress in microcantilever biosensors: revisiting Stoney’s equation
- (2012) Javier Tamayo et al. NANOTECHNOLOGY
- A nanomechanical mass sensor with yoctogram resolution
- (2012) J. Chaste et al. Nature Nanotechnology
- Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors
- (2012) Hutomo Suryo Wasisto et al. SENSORS AND ACTUATORS A-PHYSICAL
- Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer
- (2012) G. Dubourg et al. SENSORS AND ACTUATORS B-CHEMICAL
- MOF @ MEMS: Design optimization for high sensitivity chemical detection
- (2012) Anandram Venkatasubramanian et al. SENSORS AND ACTUATORS B-CHEMICAL
- In situ synthesized carbon nanotube networks on a microcantilever for sensitive detection of explosive vapors
- (2012) Wenzhou Ruan et al. SENSORS AND ACTUATORS B-CHEMICAL
- Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever
- (2012) Hutomo Suryo Wasisto et al. SENSORS AND ACTUATORS B-CHEMICAL
- Adsorption induced surface-stress sensing signal originating from both vertical interface effects and intermolecular lateral interactions
- (2011) Tiantian Yang et al. ANALYST
- Microcantilever biosensors for chemicals and bioorganisms
- (2011) Koutilya R. Buchapudi et al. ANALYST
- Immobilization strategies to develop enzymatic biosensors
- (2011) Audrey Sassolas et al. BIOTECHNOLOGY ADVANCES
- Current Excitation Method for $\Delta{R}$ Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution
- (2011) Neena A. Gilda et al. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
- Modeling, Simulation, and Design Guidelines for Piezoresistive Affinity Cantilevers
- (2011) Manoj Joshi et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- On self-heating in piezoresistive microcantilevers with short piezoresistor
- (2011) Mohd Zahid Ansari et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Microstructure and Mechanical Properties of Polypropylene/Poly(methyl methacrylate) Nanocomposite Prepared Using Supercritical Carbon Dioxide
- (2011) Rui Zhu et al. MACROMOLECULES
- Integrated microcantilevers for high-resolution sensing and probing
- (2011) Xinxin Li et al. MEASUREMENT SCIENCE and TECHNOLOGY
- Polymer nanocomposite nanomechanical cantilever sensors: material characterization, device development and application in explosive vapour detection
- (2011) V Seena et al. NANOTECHNOLOGY
- Comparative advantages of mechanical biosensors
- (2011) J.L. Arlett et al. Nature Nanotechnology
- Cantilever-like micromechanical sensors
- (2011) Anja Boisen et al. REPORTS ON PROGRESS IN PHYSICS
- A conduction–convection model for self-heating in piezoresistive microcantilever biosensors
- (2011) Mohd. Zahid Ansari et al. SENSORS AND ACTUATORS A-PHYSICAL
- Carbon-Nanotube-Film Microheater on a Polyethylene Terephthalate Substrate and Its Application in Thermochromic Displays
- (2011) Peng Liu et al. Small
- Approaches to Increasing Surface Stress for Improving Signal-to-Noise Ratio of Microcantilever Sensors
- (2010) Hai-Feng Ji et al. ANALYTICAL CHEMISTRY
- Preparation of piezoresistive nano smart hybrid material based on graphene
- (2010) Young-Ju Kim et al. CURRENT APPLIED PHYSICS
- Rapid and Sensitive Detection ofGiardia lambliaUsing a Piezoelectric Cantilever Biosensor in Finished and Source Waters
- (2010) Sen Xu et al. ENVIRONMENTAL SCIENCE & TECHNOLOGY
- Force Sensors Based on Screen-Printed Cantilevers
- (2010) Riadh Lakhmi et al. IEEE SENSORS JOURNAL
- Diffusing and swelling in SU-8: insight in material properties and processing
- (2010) Kristof Wouters et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Fabrication of thin SU-8 cantilevers: initial bending, release and time stability
- (2010) Stephan Keller et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection
- (2010) Yongliang Yang et al. MICROELECTRONIC ENGINEERING
- Bio/chemical detection in liquid with self-sensing Pr-Oxi-Lever (piezo-resistive SiO2 cantilever) sensors
- (2010) Ying Chen et al. MICROELECTRONIC ENGINEERING
- Cantilever-based sensing: the origin of surface stress and optimization strategies
- (2010) Michel Godin et al. NANOTECHNOLOGY
- Diffusion of water into SU-8 microcantilevers
- (2010) Chuanjun Liu et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- A chemisorption-based microcantilever chemical sensor for the detection of trimethylamine
- (2010) Rui Yang et al. SENSORS AND ACTUATORS B-CHEMICAL
- Drift study of SU8 cantilevers in liquid and gaseous environments
- (2010) Maria Tenje et al. ULTRAMICROSCOPY
- Arrays of Dual Nanomechanical Resonators for Selective Biological Detection
- (2009) Daniel Ramos et al. ANALYTICAL CHEMISTRY
- MEMS Composite Porous Silicon/Polysilicon Cantilever Sensor for Enhanced Triglycerides Biosensing
- (2009) Renny Edwin Fernandez et al. IEEE SENSORS JOURNAL
- A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor
- (2009) Youzheng Zhou et al. IEEE SENSORS JOURNAL
- Design optimization of piezoresistive cantilevers for force sensing in air and water
- (2009) Joseph C. Doll et al. JOURNAL OF APPLIED PHYSICS
- Effects of gold patterning on the bending profile and frequency response of a microcantilever
- (2009) Dongkyu Lee et al. JOURNAL OF APPLIED PHYSICS
- Piezoresistive Cantilever Performance—Part II: Optimization
- (2009) Sung-Jin Park et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity
- (2009) Sung-Jin Park et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Thermoplastic microcantilevers fabricated by nanoimprint lithography
- (2009) Anders Greve et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor
- (2009) Youzheng Zhou et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Influence of air humidity on polymeric microresonators
- (2009) S Schmid et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- SU-8 force sensing pillar arrays for biological measurements
- (2009) Joseph C. Doll et al. LAB ON A CHIP
- Design & fabrication of cantilever array biosensors
- (2009) Anja Boisen et al. Materials Today
- Silicon microcantilevers with MOSFET detection
- (2009) Giordano Tosolini et al. MICROELECTRONIC ENGINEERING
- In vivo wireless ethanol vapor detection in the Wistar rat
- (2009) C. Parks Cheney et al. SENSORS AND ACTUATORS B-CHEMICAL
- Polymer microcantilever biochemical sensors with integrated polymer composites for electrical detection
- (2009) V. Seena et al. SOLID STATE SCIENCES
- Frontiers in HWCVD
- (2009) R.E.I. Schropp THIN SOLID FILMS
- Functionalization of SU-8 photoresist surfaces with IgG proteins
- (2008) Gabriela Blagoi et al. APPLIED SURFACE SCIENCE
- Microcantilevers: Sensing Chemical Interactions via Mechanical Motion
- (2008) Karen M. Goeders et al. CHEMICAL REVIEWS
- Simple surface modification techniques for immobilization of biomolecules on SU-8
- (2008) A. Deepu et al. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE
- Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls
- (2008) Po-Jui Chen et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Fabrication and Characterization of a Polymeric Microcantilever With an Encapsulated Hotwire CVD Polysilicon Piezoresistor
- (2008) N.S. Kale et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Processing of thin SU-8 films
- (2008) Stephan Keller et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Surface Modification of SU-8 for Enhanced Biofunctionality and Nonfouling Properties
- (2008) Sarah L. Tao et al. LANGMUIR
- Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
- (2008) G. Villanueva et al. MICROELECTRONIC ENGINEERING
- Intrinsically conductive polymer thin film piezoresistors
- (2008) M. Lillemose et al. MICROELECTRONIC ENGINEERING
- Stress and aging minimization in photoplastic AFM probes
- (2008) C. Martin et al. MICROELECTRONIC ENGINEERING
- Label-free detection of DNA hybridization based on hydration-induced tension in nucleic acid films
- (2008) Johann Mertens et al. Nature Nanotechnology
- SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods
- (2008) Maria Nordström et al. SENSORS
- The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing
- (2008) A. Loui et al. SENSORS AND ACTUATORS A-PHYSICAL
- Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment
- (2008) S. Schmid et al. SENSORS AND ACTUATORS A-PHYSICAL
- Suspension of nanoparticles in SU-8: Processing and characterization of nanocomposite polymers
- (2007) H.C. Chiamori et al. MICROELECTRONICS JOURNAL
- DNA hybridization measurement by self-sensing piezoresistive microcantilevers in CMOS biosensor
- (2007) S.M. Yang et al. SENSORS AND ACTUATORS B-CHEMICAL
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started