Microstructure research for ferroelectric origin in the strained Hf0.5Zr0.5O2 thin film via geometric phase analysis

标题
Microstructure research for ferroelectric origin in the strained Hf0.5Zr0.5O2 thin film via geometric phase analysis
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 14, Pages 143503
出版商
AIP Publishing
发表日期
2018-04-02
DOI
10.1063/1.5013093

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