Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition

Effects of gap size, temperature and pumping pressure on the fluid dynamics and chemical kinetics of in-line spatial atomic layer deposition of Al 2 O 3

(2016) Dongqing Pan et al.   INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER

Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition

(2016) Zhang Deng et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition of ZnO/TiO2 nanolaminates

(2016) Rong Chen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor

(2016) Ho Jun Kim et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Multi-model simulation of 300mm silicon-nitride thin-film deposition by PECVD and experimental verification

(2016) Huanxiong Xia et al.   SURFACE & COATINGS TECHNOLOGY

Mechanistic modeling of atomic layer deposition of alumina process with detailed surface chemical kinetics

(2015) Yuanyuan Xie et al.   CHEMICAL ENGINEERING JOURNAL

Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition Based on Generalized Predictive Control

(2015) Wen-Jie He et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach

(2015) Dongqing Pan et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Low temperature temporal and spatial atomic layer deposition of TiO2 films

(2015) Morteza Aghaee et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor

(2015) Kashish Sharma et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

(2015) Jeffrey A. Klug et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices

(2015) Robert L. Z. Hoye et al.   APL Materials

Low-Temperature Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films

(2014) Kamran Ali et al.   LANGMUIR

Smooth trajectory planning methods using physical limits

(2014) An Yong Lee et al.   PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE

Spatial atmospheric atomic layer deposition: a new laboratory and industrial tool for low-cost photovoltaics

(2014) David Muñoz-Rojas et al.   Materials Horizons

Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness

(2013) Alexander S. Yersak et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Design and implementation of a novel portable atomic layer deposition/chemical vapor deposition hybrid reactor

(2013) Sathees Kannan Selvaraj et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

On the kinetics of spatial atomic layer deposition

(2012) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

The kinetics of low-temperature spatial atomic layer deposition of aluminum oxide

(2012) P. Poodt et al.   THIN SOLID FILMS

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

(2011) A. Illiberi et al.   ACS Applied Materials & Interfaces

An atomic layer deposition process for moving flexible substrates

(2011) P.S. Maydannik et al.   CHEMICAL ENGINEERING JOURNAL

Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head

(2011) P. Ryan Fitzpatrick et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

(2011) W.M.M. (Erwin) Kessels et al.   MRS BULLETIN

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Design of an atomic layer deposition reactor for hydrogen sulfide compatibility

(2010) Neil P. Dasgupta et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Motion Profile Design to Reduce Residual Vibration of High-Speed Positioning Stages

(2009) Huaizhong Li et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Oxide Electronics by Spatial Atomic Layer Deposition

(2009) David H. Levy et al.   Journal of Display Technology

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS

Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition

(2008) X. Du et al.   SENSORS AND ACTUATORS B-CHEMICAL